Space-saving and maintenance-free temperature control solutions for your CVD coating systems

The development and production of CVD coating systems is complex and requires special expertise. This applies in particular to cooling. The interaction of sensors and actuators for cooling systems in your plant is crucial. Thanks to the large selection of components and many years of experience, Bürkert can offer you a cooling solution that is individually tailored to your requirements. We are at your side as a competent fluidics partner from planning to start-up and maintenance.

Limited spatial capacity and difficult machine maintenance in CVD coating systems

CVD coating plants must perform at their best in order to operate economically. Effective cooling plays a decisive role in this. This is because the CVD coating should only be deposited on the substrate and not in the reactor.
Overall, the coating system should be as compact as possible. Therefore, in conventional solutions, it is difficult to replace components due to the limited space available. Often, entire sub-systems have to be dismantled in a laborious manner in order to access the actual wear part. In addition, the procurement of the parts to be replaced takes a very long time.

An armature concept for a coating plant is highly demanding and complex. Starting with the engineering, through the selection and testing of the components in interaction, to purchase, installation and proper operation.

Grafische Darstellung von links nach rechts: PC-Arbeitsplatz plus Figur in Arbeitskleidung, darüber eine Sprechblase mit einem Fluidikplan und Fragezeichen – Figur in Arbeitskleidung, die eine komplexe technische Einheit zusammensetzt, Schachteln, in denen sich Bauteile befinden – Figur in Arbeitskleidung mit einem Zettel in den Händen vor einer größeren technischen Anlage in einem Schrank, geöffnete Tür

The construction of conventional cooling systems consists of numerous components and requires a large amount of space. However, especially in systems that work in cost-intensive clean rooms, the size of the coating plant should be as small as possible.

Grafische Darstellung: rechts größerer Schrank mit technischer Anlage, sechs Pfeile nach außen in alle Raumrichtungen, darin Kubus; links Kubus vergrößert dargestellt, darin komplexe technische Einheit, sechs Pfeile nach außen in alle Raumrichtungen; in der Mitte Pfeil von links nach rechts weisend

When using single components and their piping, there are many sealing points. This is associated with an increased risk of leakage. Leakages and extensive maintenance work prolong downtimes and reduce the number of pieces produced by the CVD coating plant.

Grafische Darstellung von links nach rechts: größerer Schrank mit technischer Anlage, Detailansicht in Lupe – Figur in Arbeitskleidungmit Schraubenschlüssel in der Hand, die eine komplexe technische Einheit repariert, darum herum verstreut Bauteile – Schrank mit technischer Anlage, Förderband mit Reihe von Halbleiter-Chips, das Ganze durchgestrichen

A smooth production process in CVD coating systems is essential. The use of special parts entails high logistics costs in the event of maintenance. The supply of spare parts also takes a long time and can lead to downtimes in production.

Grafische Darstellung von links nach rechts: komplexere technische Einheit, Rauchfahne, Symbol Achtungzeichen – Weltkarte; darauf Würfel, die Städte markieren, Minaturen von Schachteln, Ventile, Transportfahrzeug – Figur in Arbeitskleidung kniend vor einem Schrank, geöffnete Tür, darin größere technischen Anlage sichtbar

Versatile and low-maintenance system solutions for your cooling tasks

Bürkert supports you with its fluid technology experience in an optimised and individually tailored cooling solution for your gas separation system. The combination of space-optimized, welded or machined block solutions with high-quality stainless steel fittings results in compact fluidic solutions that are precisely tailored to your requirements. The proven and reliable Bürkert technology is characterised by a very long service life. This increases your process reliability and makes maintenance almost superfluous.

Space-saving, welded or machined block solutions

Grafische Darstellung von verschiedenen einzelnen Fluidik-Komponenten auf der linken Seite; in der Mitte Block mit drei Ventilen, Symbol Herz mit Kreispfeil; rechts vier übereinander angeordnete Varianten von Blöcken mit anderen Ventiltypen; Pfeile

The advantages of the Bürkert system solution:

Thanks to the high-quality and durable Bürkert components, your systems will be more reliable. Malfunctions and time-consuming maintenance are a thing of the past.

Grafische Darstellung Block mit drei Ventilen, Durchflusssensor; Pfeil, Symbol Uhr

The Bürkert assemblies are manufactured in our own factories – without being dependent on long supply chains. Due to large stocks, we deliver directly in an emergency. The plug-and-play solutions enable quick installation and minimise downtimes.

Grafische Darstellung einer Weltkarte; darauf Würfel, welche Städte markieren, Minaturen von Schachteln, Ventilen und eines Transportfahrzeugs; links und rechts der Weltkarte je dieselbe Detaildarstellung einer Anlage mit zentral platziertem Block mit drei Ventilen; links mit einem rot gefärbten Ventil

With Bürkert system solutions, you no longer have to assemble individual components. This reduces the assembly times of the cooling systems and thus the production costs of the entire coating plant.

Grafische Darstellung eines Diagramms mit zwei ansteigenden Kurven, schwarz und blau, y-Achse mit Symbol Geldmünzen, x-Ache mit Symbol Stückzahl; Darstellung eines komplexen technischen Bauteils, zugeordnet der schwarzen Kurve und eines kleineren Bauteils, zugeordnet der blauen, niedriger verlaufenden Kurve

Quantity

Comparison of manual solution and Bürkert solution:
With component costs of €200 and an installation time of 50 minutes, requiring €100 installation costs, the manual solution results in a total cost of €300.
In the Bürkert solution, on the other hand, the installation time is reduced to 20 minutes. This corresponds to assembly costs of €240. The total cost therefore amounts to €240. As the number of units increases, the 20% saving will have an enormous impact on your total assembly costs.

The compact construction of the system leaves room for individual designs and requires little installation space. The compact construction is a particular advantage for plants that are operated in clean rooms. This means that either more machines can be placed in a room or, in the case of a new building, the rooms can be planned to be smaller.

Grafische Darstellung eines größeren Schaltschrankes und einer Einheit aus zwei kleineren Schaltschränken; Darstellung eines komplexen technischen Bauteils, zugeordnet dem größeren Schaltschrank und eines kleineren Bauteils, zugeordnet den beiden kleineren Schaltschränken; die Schaltschränke umhüllt von zwei gleich große Kuben aus punktierten Linien

Space requirement in the clean room: left, conventional, right, Bürkert solution

In the completely welded Bürkert system, there are no interfaces at which leaks could occur. This eliminates the need for extensive maintenance work and your CVD coating plant runs reliably.

Grafische Darstellung eines Ventilblocks, Lupe, transparente Detaildarstellung in Kreis, dort Flüssigkeit im Inneren sichtbar; Pfeil, Darstellung einer herkömmlichen Lösung aus einzelnen Bauteilen, verschmutzt und mit herabtropfender Flüssigkeit, das Ganze durchgestrichen

The Bürkert temperature control system can be easily installed in your CVD coating plant in a very short time via plug-and-play. In the event of maintenance, you can quickly replace components.

Grafische Darstellung eines Ventilblocks, zwei der Ventile mit Steuerköpfen

Depending on how your plant is to be structured, we adapt the modular armature system and the necessary peripherals perfectly to your requirements.

Grafische Darstellung von links nach rechts: Ventilblock, Pfeil – Detail einer Anlage mit offenen Rohrleitungen, Pfeil – dasselbe Detail mit eingesetztem Ventilblock; darüber Lupe mit Detailansicht

Individual armature blocks for minimal downtime

Depending on your requirements, the Bürkert solution integrates a large number of components in a central armature block or in several armature blocks. We adapt our system solutions to your space requirements, the desired range of functions, your maintenance concept and the specified digital communication infrastructure.

We adapt the Bürkert system solutions 100% to your requirements

Grafische Darstellung von verschiedenen einzelnen Fluidik-Komponenten auf der linken Seite, Pfeile; rechts komplexer Block mit Ventilen und Sensoren, Verrohrung

Comparison of the assembly times of a conventional piped solution with a Bürkert system solution

In this calculation example we show how much installation time you can save with the Bürkert solution at your component supplier. According to the motto “time is money”, the shortened assembly times mean enormous cost savings for you.

Conventional solution versus Bürkert solution

Conventional solution as a triple block versus Bürkert solution: The installation time is reduced by approx. 38 mins per unit. This saves two thirds of the installation time.