Application Solutions for Semiconductor Manufacturing
Tank Blanketing, Water Cooling & Monitoring, Process Cooling, Gas Abatement in Semiconductor Production
For more than a decade, Burkert Fluid Control Systems has been a strategic global solution partner to leading semiconductor production facilities. The complete range of valves, sensors, and controllers along with the in-house engineering expertise and dedicated manifold production allows Burkert to create bespoke solutions that are fit for purpose in Tank Blanketing, Water Cooling & Monitoring, Process Cooling, and Gas Abatement applications within the semiconductor manufacturing process.
To ensure safe production processes in the cleanroom, efficient utilization of ultra-pure media in liquid handling operations, reliable and repeatable cooling & temperature control, and precise, safe gas and liquid control for the subfab - Burkert offers a range of primary and secondary solutions, both customized and off-the-shelf.
Primary Solutions can range from multi-channel control manifolds, motor valves, sensors (pressure, temperature, flow), and even complete tank blanketing system solutions.
Modular process valve cluster – distributor and collector
- Valve cluster ready for installation
- Compact design without any potential leakage
- No assembly effort
- No piping between the valves needed
- Trusted actuators for simple automation
Electromotive 2-way globe proportional valve
- Actuator is not wetted
- Excellent setting range and fast reaction time
- Low electrical power consumption
- Connection orifice DN 8...15
- Variants: standard, positioner, process controller and high-pressure variants for up to 22 bar
Electromotive 2-way globe proportional valve
- Actuator isolated from flow path
- Excellent range and fast response times
- Low power consumption
- Connection orifice DN 15...25
- Variants: standard, positioner, process controller
FLOWave SAW flowmeter
- No obstacles inside the measuring tube, compact, lightweight and low energy consumption
- Conforms to hygienic requirements, CIP/SIP compatible
- Ideal for liquids with low or no conductivity
- Digital communication, parameterisation via Communicator, display
- Optional: ATEX/IECEx certification, II 3G/D
Secondary Solutions cover a range of valve and controllers from solenoid shut-off valves, angle shut-off valves, mass flow controllers, and pneumatic airline manifolds.
Mass flow controller (MFC)/ mass flow meter (MFM) for gases
- Nominal flow ranges from 0.010 l/min to 160 l/min
- Highest measuring accuracy and repeatability with very fast response times
- Long-term stability of the flow calibration
- Easy device exchange due to configuration memory
- Optional: ATEX II Cat. 3G/D or USP Class VI, FDA, EC 1935 conformity
Inline flowmeter for continuous measurements
- Economical integration into pipe systems
- 3-wire frequency-pulse variant for direct connection to a PLC (PNP and NPN)
- Simple connection to Bürkert evaluation devices in a separate variant
- HT variant available for high temperatures and pressure (max. 125°C/max. 40 bar)
Conductivity meter, ELEMENT design
- Perfect for clean water and slightly concentrated liquids
- Compact measuring device for direct connection to the control level (PLC) via analogue 4…20 mA signal or digital IO-Link or Bürkert system bus (büS)/CANopen communication
- Parametrisation, calibration and transfer of parametrisation data all possible thanks to a removable display/configuration module
- Simulation of process values for diagnostics
- Universal process connection, three different cell constants to cover a wide range of applications such as reverse osmosis
Mass flow controller (MFC)/mass flow meter (MFM) for liquids
- Flow measurement/control up to 120 kg/h
- Very high accuracy and measuring range
- High long-term stability, no zero-point adjustment necessary
- Highly resistant wetted materials
- Suitable for numerous liquids
multiCELL – multi-channel/multi-function transmitter/controller
- Compatible with most common flow, pH/ORP, chlorine and conductivity sensors
- Simple, intuitive user interface with a large adjustable backlit graphics display (4 user defined views)
- Hardware extension possibilities (up to 6 free slots)
- Industrial Ethernet (Modbus TCP, PROFINET or EtherNet/IP) option available
- Functionality extendable by software options
eCONTROL – Universal controller
- Continuous, 2-point, 3-point, and on/off control
- Proportional regulation
- Sensor inputs (4-20 mA, 0-10 V, frequency, Pt100)
- Control of proportional, process, and motor valves
- Stored Bürkert proportional valves and flowmeters
Radar filling level meter for liquids and bulk solids suitable for use in applications with aggressive fluids or with hygienic requirements
- Continuous filling level measurement up to 120 m, 4...20 mA, 2-wire
- Available process connections: mounting bracket, thread (G, NPT ¾ and 1½), flange (DN50, 2" ASME), clamp (2")
- Excellent radar signal focusing and high measurement dynamics
- Adjustable via the display/configuration module and keys, alternatively via Bluetooth
AirLINE – the valve island optimised for process automation
- Safety-related shut-off of valves possible
- Higher plant availability with PROFINET S2 (system redundancy)
- Process reliability through pneumatic functions
- Optimised for installation at the bottom of the control cabinet
- EX-Versions: ATEX / IECEx Zone 2, cURus Haz. Loc. CL I, II, III Div 2
Pressure measuring device
- Ceramic/thick film measuring cell
- 2-wire variant for 4...20 mA output
- Compact, stable construction for the highest operational reliability
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