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Gas Abatement Systems

Safe and Reliable Solutions for Gas Abatement Processes

During the manufacturing of semiconductors, harmful gases are used and produced. These gases can contain perfluorocarbons (PFCs) and greenhouse gases, which must be treated before they are safely released into the atmosphere. Gas abatement systems or scrubbers are commonly used to detoxify these gases.

There are several types of abatement systems in use today. They include thermal, wet and combination thermal/wet abatement systems. Burkert mass flow controllers are used to control the flowrate of fuel gases and oxidants to burners in thermal oxidation systems. Digital communications and precise control give the user the flexibility to store recipes for quick changeovers while at the same time utilizing the exact amount of gas needed, thereby saving money.

Burkert’s fully integrated systems allow for installation into compact spaces where real estate is a premium. Integrated shutoff valves allow for safe operation and reliability. Additional inert gas purge lines can also be integrated to ensure that no fuel gases remain in the combustion chamber and flame arresters are installed at the outlet of the system to prevent flashback.  

Typical installation of mass flow controllers in a burner. Solenoid shutoff valves, purge line, and flashback arresters integrated for safety.

 

 

 

 

 

 

To develop a complete system solution, a range of Burkert product component solutions are available that communicate seamlessly and offer perfect compatibility.  

Type 8741

Mass flow controller (MFC)/mass flow meter (MFM) for gases

Type 8741
  • Nominal flow ranges from 0.010 l/min to 160 l/min
  • High accuracy and repeatability
  • Very fast response times
  • Simple device exchange due to configuration memory
  • Optional: USP Class VI, FDA, EC 1935 compliant
Type 8742

Mass flow controller (MFC)/ mass flow meter (MFM) for gases

Type 8742
  • Nominal flow ranges from 0.010 l/min to 160 l/min
  • Highest measuring accuracy and repeatability with very fast response times
  • Long-term stability of the flow calibration
  • Easy device exchange due to configuration memory
  • Optional: ATEX II Cat. 3G/D or USP Class VI, FDA, EC 1935 conformity
Type 8745

Mass flow controller (MFC)/mass flow meter (MFM) for gases

Type 8745
  • Nominal flow ranges from 20 l/min up to 2500 l/min
  • High accuracy and repeatability
  • Communication via standard signals or Industrial Ethernet
  • Electromagnetic and motor-driven valve actuation available
  • Easy device exchange through configuration memory
Type 8746

Mass flow controller (MFC)/mass flow meter (MFM) for gases

Type 8746
  • Nominal flow ranges from 20 l/min up to 2500 l/min
  • High measuring accuracy and repeatability with very fast response times
  • Long-term stability of the flow calibration
  • Simpler device exchange due to configuration memory
  • Optional: ATEX II Cat. 3G/D or USP Class VI, FDA, EC 1935 conformity
Type 8735

Multi-channel mass flow controller (MFC) / meter (MFM) for gases

Type 8735
  • Nominal flow ranges from 0.01 l/min to 20 l/min
  • High accuracy and repeatability
  • Very fast response times
  • Configurable from 2 to 8 channels
  • Tailor-made system without development effort
Type 6240

Servo-assisted 2/2-way piston valve

Type 6240
  • Servo-assisted and compact piston valve with diameter of up to DN 13
  • Vibration-resistant , screwed coil system
  • Energy-saving double coil technology with kick and drop variant
  • Safe opening with hard-coupled piston system
  • Explosion proof versions
Type 6027

Direct-acting 2/2-way plunger valve

Type 6027
  • Direct-acting, powerful valve with diameter of up to DN13
  • Vibration-proof, bolted coil system
  • Energy-saving double coil technology with kick and drop variant
  • Explosion proof versions
  • High pressure variants for gases and liquids
Type 2000

Pneumatically operated 2/2 way angle seat valve CLASSIC

Type 2000
  • Stainless steel or gunmetal housing with threaded, clamped or welded connection
  • Long service life
  • High flow rate
  • Robust actuators with modular accessory program
Type 2920

Manually operated 2/2-way angle seat valve

Type 2920
  • High flow rates
  • Long service life
  • Robust actuator with optional stroke limitation and locking
  • Flow-optimised stainless steel valve body with socket, clamp or welded connection
Type 8805

Ball valve / Butterfly valve with pneumatic rotary actuator

Type 8805
  • Pneumatic rotary actuator
  • Accurate end position setting
  • High flow values
  • High medium pressures
  • Long lifetime

 

Related information on precision heat control can be found here:

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