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Application Solutions for Semiconductor Manufacturing

Tank Blanketing, Water Cooling & Monitoring, Process Cooling, Gas Abatement in Semiconductor Production

Semiconductor Production Image

For more than a decade, Burkert Fluid Control Systems has been a strategic global solution partner to leading semiconductor production facilities. The complete range of valves, sensors, and controllers along with the in-house engineering expertise and dedicated manifold production allows Burkert to create bespoke solutions that are fit for purpose in Tank Blanketing, Water Cooling & Monitoring, Process Cooling, and Gas Abatement applications within the semiconductor manufacturing process. 

To ensure safe production processes in the cleanroom, efficient utilization of ultra-pure media in liquid handling operations, reliable and repeatable cooling & temperature control, and precise, safe gas and liquid control for the subfab - Burkert offers a range of primary and secondary solutions, both customized and off-the-shelf.

Primary Solutions can range from multi-channel control manifolds, motor valves, sensors (pressure, temperature, flow), and even complete tank blanketing system solutions.

Type 8840

Modular process valve cluster - distributor and collector

Type 8840
  • Valve cluster ready for installation
  • Compact design without any potential leakage
  • No assembly effort
  • No piping between the valves needed
  • Trusted actuators for simple automation
Type 3280

Electromotive 2-way globe proportional valve

Type 3280
  • Actuator is not wetted
  • Excellent setting range and fast reaction time
  • Low electrical power consumption
  • Connection orifice DN 8...15
  • Variants: standard, positioner, process controller and high-pressure variants for up to 22 bar
Type 3285

Electromotive 2-way globe proportional valve

Type 3285
  • Actuator isolated from flow path
  • Excellent range and fast response times
  • Low power consumption
  • Connection orifice DN 15...25
  • Variants: standard, positioner, process controller
Type 8098

FLOWave SAW flowmeter

Type 8098
  • No obstacles inside the measuring tube, compact, lightweight and low energy consumption
  • Conforms to hygienic requirements, CIP/SIP compatible
  • Ideal for liquids with low or no conductivity
  • Digital communication, parameterisation via Communicator, display
  • Optional: ATEX/IECEx certification, II 3G/D

 

Secondary Solutions cover a range of valve and controllers from solenoid shut-off valves, angle shut-off valves, mass flow controllers, and pneumatic airline manifolds. 

Type 8742

Mass flow controller (MFC)/ mass flow meter (MFM) for gases

Type 8742
  • Nominal flow ranges from 0.010 l/min to 160 l/min
  • Highest measuring accuracy and repeatability with very fast response times
  • Long-term stability of the flow calibration
  • Easy device exchange due to configuration memory
  • Optional: ATEX II Cat. 3G/D or USP Class VI, FDA, EC 1935 conformity
Type 8030

Inline flowmeter for continuous measurements

Type 8030
  • Economic integration in pipe systems without any additional piping
  • 3-wire frequency pulse variant to directly interface with PLC’s (PNP and NPN)
  • Connection to Bürkert devices in remote variants
  • Variant HT for high temperature and pressure (max. 125 °C/max. 40 bar) available
Type 8222

Conductivity meter, ELEMENT design

Type 8222
  • Perfect for clean water and slightly concentrated liquids
  • Compact measurement device for direct connection to the monitoring level (PLC) via analogue 4…20 mA signal or digital IO-Link or Bürkert system bus (büS)/CANopen communication
  • Parameterisation, calibration and transfer of parameterisation data all possible thanks to a removable display/configuration module
  • Simulation of process values for diagnostics
  • Universal process connection, three different cell constants to cover a wide range of applications such as reverse osmosis
Type 8756

Mass flow controller (MFC)/mass flow meter (MFM) for liquids

Type 8756
  • Flow measurement/control up to 120 kg/h
  • Very high accuracy and measuring range
  • High long-term stability, no zero-point adjustment necessary
  • Highly resistant wetted materials
  • Suitable for numerous liquids
Type 8619

multiCELL - Multi-channel and multi-function transmitter/controller

Type 8619
  • Compatible with most common flow, pH/ORP, chlorine and conductivity sensors
  • Simple, intuitive user interface with a large adjustable backlit graphics display (4 user defined views)
  • Hardware extension possibilities (up to 6 free slots)
  • Industrial Ethernet (Modbus TCP, PROFINET or EtherNet/IP) option available
  • Functionality extendable by software options
Type 8611

eCONTROL - Universal controller

Type 8611
  • Continuous, 2-point, 3-point and On/Off control
  • Ratio control function
  • Sensor inputs (4-20 mA, 0-10 V, frequency, RTD)
  • Control of proportional, process and motor valves
  • Bürkert proportional valves and flow meters are memorized
Type 8140

Radar filling level meter for liquids and bulk solids suitable for use in applications with aggressive fluids or with hygienic requirements

Type 8140
  • Continuous filling level measurement up to 120 m, 4...20 mA, 2-wire
  • Available process connections: mounting bracket, thread (G, NPT ¾ and 1½), flange (DN50, 2" ASME), clamp (2")
  • Excellent radar signal focusing and high measurement dynamics
  • Adjustable via the display/configuration module and keys, alternatively via Bluetooth

 

Type 8652

AirLINE – the valve island optimised for process automation

Type 8652
  • Safety-related shut-off of valves possible
  • Easy diagnostics via LC display
  • Process reliability through pneumatic functions
  • Optimised for installation at the bottom of the control cabinet
  • EX-Versions: ATEX / IECEx Zone 2, cURus Haz. Loc. CL I, II, III Div 2
Type 8316

Pressure measuring device

Type 8316
  • Ceramic/thick film measuring cell
  • 2-wire version for 4...20 mA output
  • Compact, stable construction for the highest operational reliability

 

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